Charles,
I have worked with glass samples I received from Schott. I was intrigued
with two of the glasses aspects; 1) photo-patternability and 2) anodic
bondability. I saw FOTURAN as a possible rapid prototyping material with
specific micro-fluidic applications. The depth was easy to achieve with but
the bottoms and sidewalls were rough. When I tried to anodic bond the
patterned glass to silicon the glass cracked rather violently, I believe due
to TCE mismatch. TCE(FOTURAN) = 8.6 ppm and TCE(Silicon) = 2.6ppm. I did
not use any tricks just what I leaned in the document "Fotosensitive
structuring of FOTURAN" that I received from Craig Wurzel.
Hope this helps,
Loren.
-----Original Message-----
From: Charles Ellis [mailto:[email protected]]
Sent: Tuesday, January 28, 2003 2:49 PM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] Photo-definable glass
Loren,
Have you actually worked with this glass. I have found it to be almost
impossible to work with, and expensive. If someone has a lot of
experience with this glass please let me know, I would like to learn the
"tricks".
Thanks,
Charles Ellis
Auburn University
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of St.Clair, Loren
Sent: Tuesday, January 28, 2003 7:47 AM
To: 'General MEMS discussion'; '[email protected]'
Subject: RE: [mems-talk] Photo-definable glass
Sarah,
Foturan from Schott Corporation is a material that can be patterned
using a
standard mask aligner (300-320nm) and HF. Craig Wurzel can be contacted
at
[email protected] if you have any questions about prices.
Hope this helps,
Loren St. Clair
-----Original Message-----
From: Sarah Schwab [mailto:[email protected]]
Sent: Friday, January 24, 2003 4:38 PM
To: '[email protected]'
Subject: [mems-talk] Photo-definable glass
Hello there
I am looking for some information on photo-definable glass.
Could anyone please help me with the following:
Suppliers?
Approx cost per wafer 4" diameter - sample quantities?
Minimum thickness?
Many thanks
Sarah
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/
