Prem Pal-
I have used nickel for a mask in EDP and KOH.The nickel is not attacked
but at least in KOH an oxide was formed.If you need to remove the nickel
after the etch you may have a problem. I used sputtered nickel.

Dan Chilcott

-----Original Message-----
From: Prem Pal [mailto:[email protected]]
Sent: Monday, February 03, 2003 6:48 AM
To: [email protected]
Subject: [mems-talk] nickel as a mask in EDP


Dear all
Can electroless or electroplated Nickel be used as a mask for
anisotropic etching in EDP.any type of suggetion would be highly
appreciated.
thanx


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