Photoresist blistering during E-beam evaporation onto
glass
Timothy D. Meehan
2003-02-05
I am trying to evaporate (by electron beam evaporation) Ti/Au onto glass
microscope slides and/or coverslips. The stage which backs the glass
substrates is water cooled. I have NOT seen blistering of the resist on
Si however. Has anyone seen this before? Thank you.
Tim Meehan
Superfine Group
Department of Chemistry
University of North Carolina
@ ChapelHill