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MEMSnet Home: MEMS-Talk: Adhesion of parylene to electrodes
Adhesion of parylene to electrodes
2003-02-03
[email protected]
2003-02-06
Bill Moffat
Adhesion of parylene to electrodes
Bill Moffat
2003-02-06
My company makes silane equipment to assist the adhesion of organics to non
organics.  I am not familiar with A-174 but if the vapor pressure is in a
reasonable range I could arrange for deposition of the silane in our equipment.
Possible advantages:- with silicon wafers and HMDS the preferred silane we
dehydrate totally then apply the silane as a vapor which gives a sealed
hydrophobic surface that has been mailed back to literally hundreds of customers
with no degradation in the mail.  let me know if I can help.  Bill Moffat

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Monday, February 03, 2003 7:05 AM
To: [email protected]
Subject: [mems-talk] Adhesion of parylene to electrodes


Hi. We are studying DEP microfluidics at the University of
Rochester. We are working on an experiment to observe the behavior of
water actuated over two nearly parallel vertical electrodes coated with
parylene. However, there have been some problems with the adhesion of
parylene to steel electrodes.

1. We know the roughness of electrodes will affect the adhesion, but we
don't know how smooth we should polish the electrodes, and what steps of
cleaning or drying should be performed.

2. We are ready to try A-174 silane as a adhesion promoter, but we don't
know some treatment details, for example, how long should the electrodes
be kept in the solution, how much time can lapse between applying the
adhesion promoter and the parylene coating treatment.
Does anybody know something about the above questions or other better
methods?

We appreciate your suggestion and help!



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