According to my old heat transfer book, Silicon has a thermal conductivity
of 148 W/mK, whereas pyrex has 1.4 W/mK. Maybe there's a vacuum-safe
thermal grease you can use?

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Never worry again about the quality of your random numbers!"
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On Wed, 5 Feb 2003, Timothy D. Meehan wrote:

> I am trying to evaporate (by electron beam evaporation) Ti/Au onto glass
> microscope slides and/or coverslips. The stage which backs the glass
> substrates is water cooled. I have NOT seen blistering of the resist on
> Si however. Has anyone seen this before? Thank you.
>
> Tim Meehan
> Superfine Group
> Department of Chemistry
> University of North Carolina
> @ ChapelHill
>
>
>
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