I have been producing SAW devices with frequencies up to 360 MHz on
ST-quartz with Al structures via a lift-off process and did not encounter
adhesion problems (electrode width down to 0.8 μm). Cleanliness of teh
surface is (as always) important. The structures were used for gas sensor
applications, so there haven't been very high physical requirements.
Hope this helps
Holger Becker
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Dr. Holger Becker
IIP-Technologies GmbH
Niebuhrstrasse 1a
D-53113 Bonn
Tel: +49 228 969 5513
Fax: +49 228 969 5522
www.iip-tec.com