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PMMA
2003-02-11
Narayanan Unni
PMMA
Narayanan Unni
2003-02-11
I have a slightly different background. I work on organic field effect
transistors.I use PMMA as the gate insulator instead of SiO2. I have seen people
bake PMMA after spin coating, when they use it for lithography. Comments are
appreciated on the effects of baking(annealing)of PMMA, in my case.
Thanks

K.N.Narayanan Unni
UMR CNRS 6136, Université Angers, 2 Bd. Lavoisier, 49045
Angers Cedex, France
Ph:(33)(0)2 41735364, Fax:(33)(0)2 41735216

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