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MEMSnet Home: MEMS-Talk: Anodic bonding SOI wafer and glass
Anodic bonding SOI wafer and glass
2003-02-13
A.K.Ismail
2003-02-13
Tony Rogers
2003-03-02
zhliime
2003-02-13
Kristian Pontoppidan Larsen
2003-02-13
Blunier, Stefan
Anodic bonding SOI wafer and glass
A.K.Ismail
2003-02-13
Hi,

Does anybody has experience of how to bond SOI wafer to glass wafer using
anodic bonding?
Our SOI wafer is about 175-450 micron Si, 1 micron Oxide and 1 micron Si p+.
The interface bonding layer would be the 1 micron Si p+ layer on SOI wafer
with another glass substrate. Your response would be appreciated.

Thank you.

A.K.Ismail



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