Hi all,

Au films that I deposited using an E-beam evaporator
have some spherical lumps of Au on the surface.
The radius of the spheres are 200 nm ~ 2 um, and
the samples are Si/2.5nm Cr/5nm Au.

Can some of you let me know why this happens and
how I can avoid it?

Thanks,

Changsoon Kim

Dept. of Electrical Engineering
Princeton University