Hi Mark. We can supply you whole system for KOH or
TMAH etching with 4 electrode EC etch stop. You would
have to specify number of chambers, wafer size and
other parameters. We use a proprietary wafer holder
with no screws and no springs on the wafer back side
and easy wafer exchange.
Best Regards
Pavel Neuzil
SiMEMS Pte Ltd
neuzils @yahoo.com

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