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MEMSnet Home: MEMS-Talk: Moving samples in RIE
Moving samples in RIE
2003-02-12
George C. Lopez
2003-02-13
[email protected]
2003-02-13
Henry Yang
2003-02-21
Yinbao Yang
Moving samples in RIE
[email protected]
2003-02-13
Aluminum holders should be fine for this. You might also want to check your pump
down to make sure it is slow. A lot of times when you initially evacuate the
chamber there is a surge that can move the samples from their original location.
You can use a holder or use cool grease to keep them in place but be sure to
include soft pump down in your sequence. bob Henderson

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