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MEMSnet Home: MEMS-Talk: probs removing S1813 from glass after E-beam evap
probs removing S1813 from glass after E-beam evap
2003-02-13
Timothy D. Meehan
2003-02-18
Sang (Kevin) Kim
probs removing S1813 from glass after E-beam evap
Timothy D. Meehan
2003-02-13
I am having difficulty doing lift-off of Shipley 1813 resist from glass
following electron beam evaporation of Ti/Au. The evaporation follows
standard photolithographic UV exposure and developing. The lift-off
protocol I am using is sonication in acetone. Out of frustration I have
even soaked the sample in nanostrip for an hour to no avail. Any advice
would be appreciated.



Tim Meehan
Superfine Group
Department of Chemistry
University of North Carolina
@ ChapelHill


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