Dear

I'm trying to etch Pt layer on a glass wafer.
I sputtered Ti and Pt 1000A and 3000A thick respectively on a 4" glass wafer.
I patterned with AZ1512 first and then tried to etch the Pt layer with aqua
regia( HCl:HNO3=3:1).
But I couldn't identify any etching of the Pt.

Do I need to heat the aqua regia to etch the Pt layer?
If I do not raise the temperature, can't I etch the Pt?
Then What is the proper temperature?

I hope to get your reply soon...

Thank you...
Have a nice day~~!!




Shin, Young Shik,
Master Candidate
Micro-BioMechanics Team, Advanced Machine Element Design Laboratory,
School of Mechanical & Aerospace Engineering, Seoul National University

[email protected]   [email protected]