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MEMSnet Home: MEMS-Talk: Experimantal data on squeeze film damping
Experimantal data on squeeze film damping
2003-02-20
rosso david
Experimantal data on squeeze film damping
rosso david
2003-02-20
Does anybody know where I can find some experimental results about the
squeeze film damping effect for fixed-fixed microrelays?
In particular I'm interested in the resonance shift due to the air
compressibility and quality factor Q as a function of ambient pressure.

Thanks a lot

David Rosso


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