Hi Bing,

Pink plasma indicates N2 in the systems (ie air) - most likely case is that
you have a leak as you mention. Best course of action is to use a leak
checker or failing that a rate of rise check each time you blank off a
potential source.

Good luck.

Andy McQuarrie
Surface Technology Systems

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We have a BOC Edwards Auto 500 Sputtering system.  The normal glow plasma
color was light green, but it is pink. I still can deposit Au films with
lower deposition rate but not Si, instead I got transparent films. I
suspect the chamber has leakage and the Si could be oxidized. Does anybody
has the same experience? Please advice.

Bing


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