Sofiane,
        My company has built numerous anti stiction units.  the secret is to get
the parts totally dry then without exposing them to any air apply the anti
stiction coating.  Usually any of the silanes will produce a Hydrophobic layer.
Another approach is to use one of the octodeconal chemicals.  These usually are
solids that melt below 100 degrees C and if the atmosphere is low enough in
pressure will sublime and redeposit on your units.  Not sure where you are
geographically but I can possibly run samples for you.  let me know what I can
do to help.  Bill Moffat

-----Original Message-----
From: sou zou [mailto:[email protected]]
Sent: Tuesday, February 18, 2003 8:29 AM
To: [email protected]
Subject: [mems-talk] tackling MEMS stiction & damp ?



Hi folks,

The stiction for MEMS due to damp is not a new behaviour. In fact, we are
getting in trouble to move our devices (MUMP's components, but Before we didn't
get this problem). So, we are expecting a high level of damp in the experiment
area in use. My concern is how to tackle this prb immediately (e.g by using a
special spray or stuff like that ?).

Many thanks,

Sofiane



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