Hello Yair,
I think that it is necessary the use of an adhesion promoter because the Pyralin
has bad adhesion properties. The adhesion promoter that I use for the PYRALIN
2555 is the VM 651 from HD MicroSystems. I recommend you to contact with HD
MicroSystems.
Best regards,
Isabel.
-----Original Message-----
From: Yair [mailto:[email protected]]
Sent: miércoles 19 de febrero de 2003 7:10
To: 'General MEMS discussion'
Subject: RE: [mems-talk] my Pyralin is breaking off
Hello Isabel,
I don't have an adhesion promoter. Isn't there any other way?
Thanks in any case,
Yair
-----Original Message-----
From: Rivas, Isabel [mailto:[email protected]]
Sent: Monday, February 17, 2003 4:58 PM
To: General MEMS discussion
Subject: RE: [mems-talk] my Pyralin is breaking off
Hello Yair,
Do you apply an adhesion promoter before the Pyralin deposition?.
Best regards.
Isabel Rivas Guerrero
[email protected]
CEIT, Microelectronic section
Pº Manuel Lardizabal Nº 15
San Sebastian (Spain)
-----Original Message-----
From: Yair [mailto:[email protected]]
Sent: jueves 13 de febrero de 2003 12:58
To: [email protected]
Subject: [mems-talk] my Pyralin is breaking off
Hello,
I'm using Pyralin 2555 (1:1), ~3um thick, as a dielectric thin film.
After photolitogrphy and development, I want to remove the photoresist
(AZ2020) with Acetone, but the Pyralin is peeling off my substrate as
well (it is not cured yet). Can anyone recommend me something about
that?
Thanks a lot,
Yair Gannot, Process Engineer
Wolfson Microelectronics Research Center
TECHNION - ISRAEL INSTITUTE OF TECHNOLOGY
Technion City, Haifa 3200, Israel
Tel- +972-4-8293291
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