The plasma color is also influenced by the target but to determine if
you have a leak pump down to a few mTorr and valve off the pump from the
chamber. Record the pressure rise as a function of time and determine
the leak up rate. Compare this figure to the specifications of the
system. To locate the leak pum down and squirt isopropanol around the
o-rings and look for a sudden pressure rise.

-Mike

>>> [email protected] 02/17/03 08:51PM >>>
We have a BOC Edwards Auto 500 Sputtering system.  The normal glow
plasma color was light green, but it is pink. I still can deposit Au
films with lower deposition rate but not Si, instead I got transparent
films. I suspect the chamber has leakage and the Si could be oxidized.
Does anybody has the same experience? Please advice.

Bing



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