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MEMSnet Home: MEMS-Talk: indium alloys - deposition and patterning
indium alloys - deposition and patterning
2003-02-21
[email protected]
2003-02-24
Shay Kaplan
2003-02-24
Bill Moffat (4 parts)
indium alloys - deposition and patterning
[email protected]
2003-02-21
Indium can easily be evaporated to those thicknesses. We have built evaporators
for this purpose. I don't know how to etch the material but you could use a
lift-off technique with thick photoresist. Maybe Bill Moffet can provide some
insights to lift-off with those thicknesses. Bob Henderson

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