How do you measure the residual stress? Is it measured on a wafer level?
What would be the tolerances of the warp? Is it an issue that requires
incoming inspection on a sample basis? 100% inspection?
David Banitt - CEO
Nano-Or Technologies Ltd.
1 Yodfat St.
Lod 71291 Israel
Tel +972 (0)8 9282801
Fax +972 (0)8 9282805
[email protected]
-----Original Message-----
From: Maximiliano Fischer [mailto:[email protected]]
Sent: Friday, February 21, 2003 8:51 PM
To: [email protected]
Subject: [mems-talk] Residual Stress of Silicon Nitride
Dear MEMS Specialists,
I really appreciate if you could help me find data on residual stresses
left in Silicon Nitride layers on usual and hi-quality wafers. For our
research, we would need to find very-low-stress nitride-layered wafers or
methods to create them by our own. Prices, availability and literature are
welcome.
Thanks!
--
_________________________________________________
Maximiliano Fischer
Eng MSc Aero & Astro
CNEA - UNSAM MEMS Group
