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MEMSnet Home: MEMS-Talk: CK-6020L processing and properties
CK-6020L processing and properties
2003-02-24
Novak Farrington
CK-6020L processing and properties
Novak Farrington
2003-02-24
Hi all,

I was just wondering if anyone has any information (or pointers to info.) on
the processing and material properties of CK-6020L resist. Of particular
interest would be optical properties in the UV portion of the spectrum eg,
reflectance, absorption, transmission etc.

Thanks in advance,

Novak

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