Hi Zhiyu:

Are you looking for something to cover fully/partially developed
PMMA and then develop the rest of the pattern ?Let me know if you
get any informaton about this. I am also looking for something on similar lines.

Or just developing the exposed and non-exposed PMMA at the same time ?
I feel if you are doing this then developing the whole wafer should
not be a problem. (Developer being GG Developer)

-Madhulika Sathe





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