Hi,
Just wondering if there is any special wet etchant recipe (Such as TMAH+Si
powder+NH4S2O8) will not attack Al and SiO2 respectively.
Thanks.
Johnny
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Johnny H.HE,  Ph.D. Candidate
Division of Electrical Engineering, Engineering
Department,Cambridge University,CB2 1PZ, UK
or Downing College, Cambridge, CB2 1DQ ,UK
Email: [email protected]
Tel:+44 1223 332605 Fax:+44 1223 332662
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