You might want to try xenon difluoride. It will leave your nickel alone and etch
away the silicon. My company, XACTIX, sells equipment for XeF2 silcion etch and
we would be happy to give you more information so please contact me.

David Springer
XACTIX, Inc.
[email protected]
 >>  Hi everyone

 >>  Iam sreeram,a grad student at the university of cincinnati.Is there a way
 >>  to chemically etch out silicon substrate from an overplated nickel layer
 >>  without the etchant attacking the nickel?I would be grateful for a
 >>  suggestion.The etching may take a longer time ( around a couple of
 >>  days)as the silicon is thicker than usual.

 >>  thanks

 >>  sreeram



 >>  Sreeram


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