Hi Jason,

   1 to 1 mixtures of 0.5M EDTA and H2O2(30%) are used to strip titanium
nitride.  Have not heard too much about a chromium nitride etch.

Phil






>From: "Wright, Jason" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] Chromium Wet Etching
>Date: Tue, 25 Feb 2003 13:35:59 -0500
>
>Hi,
>
>Would anyone know how wet etch chromium nitride or titanium nitride?
>
>Thanks
>
>_______________________________________________
>[email protected] mailing list: to unsubscribe or change your list
>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>Hosted by the MEMS Exchange, providers of MEMS processing services.
>Visit us at http://www.memsnet.org/


_________________________________________________________________
MSN 8 with e-mail virus protection service: 2 months FREE*
http://join.msn.com/?page=features/virus