Dimitris,
         Get the standard 22 degree slope back angle.  Then plasma clean with a
gentle Oxygen descum and or argon plasma surface roughness modification to
promote Si/Ag adhesion.  I have a number of technical papers on lift off and a
few production inputs on plasma treatment.  Contact me directly for more
information.  Bill Moffat

-----Original Message-----
From: Dimitris Niarchos [mailto:[email protected]]
Sent: Monday, March 03, 2003 7:36 AM
To: [email protected]
Subject: [mems-talk] Sputtering Ag on Si


Does anyone know  a good way to deposit Ag on Si - good adhesion - for
further lift-off process?


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