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MEMSnet Home: MEMS-Talk: polymer resistant to KOH etch
polymer resistant to KOH etch
2003-03-06
[email protected]
2003-03-06
Mac Daily (2 parts)
2003-03-07
Mac Daily (2 parts)
polymer resistant to KOH etch
[email protected]
2003-03-06
dear all,
can you suggest a good organic material, depositable or spinnable at low
temperature, to be used as a protection mask for long KOH etching process?
...... it should be lifted-off or etched easily in a chemistry which do
not affect SiN layers.
thank you for any help you can provide

carlo


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