Hello,

I would like to etch pyrex glass with ~5x6 mm2  and 2um deep. I have tried
to use BOE(6:1) solution for pyrex glass with thin photoresist(~1um),
however. photoresist started to peel off and be bubbled  in between
interface after 1hr. so, glass is etched in unwanted area. do you have any
idea for it? I need it to have a little bit slope on the edge because Al
eletrode should  be deposited on cavity and non-cavity area, which means it
should be a step coverage continuously after etching. after all these steps,
this glass wafer will be wafer bonded to Si wafer, which means the surface
of glass should be very smooth.

thank you,

SangHwui Lee
Ph.D candidate/MSE/NJIT
Microelectronics Research Center(MRC)
973-596-6368(O)
201-242-1486(H)





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