We are planning to modify our current KOH-etching equipment.

Our etcher is just for water-circulating bath, so it isn't
so good for etching of silicon using KOH soluton. So we are
looking for other baths which are commercially made.

Desired spec is as follows :


   - Operation Temperature 40-80 degree C
   - Homogeneous distribution of temperature
   - Condenser which can maintain etchant at constant concentration

   Optional : Capability of running under ultrasonic sound

Could any of you tell me a equipment or providers that sell
this etching bath ?

Seong-Hyok Kim
Lab. for MiSA
#301-1104, School of Elec. Eng.,
Seoul National University, San 56-1
Shillim-dong, Kwanak-gu,
Seoul 151-742 Korea

Fax : +82-2-873-9953
E-mail : [email protected]

WWW : http://plaza.snu.ac.kr/~micro