SangHwui,
          Vacuum vapor prime should take care of this problem.  You are seeing
poor adhesion because of slight moisture problems.  Good news after vacuum vapor
prime you can leave the glass exposed to atmosphere with no problems.  this
means if you can find a local vacuum vapor primer you can treat the glass and
get the correct adhesion.  If you want I can arrange sample primes hear at our
facility.  If you want to discuss this problem further contact me directly by
phone 408 954 8353 or email.  Bill Moffat

-----Original Message-----
From: Sang Hwui Lee [mailto:[email protected]]
Sent: Wednesday, March 05, 2003 9:12 AM
To: [email protected]
Subject: [mems-talk] Pyrex glass etching


Hello,

I would like to etch pyrex glass with ~5x6 mm2  and 2um deep. I have tried
to use BOE(6:1) solution for pyrex glass with thin photoresist(~1um),
however. photoresist started to peel off and be bubbled  in between
interface after 1hr. so, glass is etched in unwanted area. do you have any
idea for it? I need it to have a little bit slope on the edge because Al
eletrode should  be deposited on cavity and non-cavity area, which means it
should be a step coverage continuously after etching. after all these steps,
this glass wafer will be wafer bonded to Si wafer, which means the surface
of glass should be very smooth.

thank you,

SangHwui Lee
Ph.D candidate/MSE/NJIT
Microelectronics Research Center(MRC)
973-596-6368(O)
201-242-1486(H)





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