A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: RE. Photosensitive Parylene
RE. Photosensitive Parylene
2003-03-06
Hovey, Steve
RE. Photosensitive Parylene
Hovey, Steve
2003-03-06
Thanks for the responses.  I've gathered reading some of the recent posts
about spin on materials that some of them result in Parylene-like materials
after processing.

What I was hoping to find out, however, was if there had been any work done
to try and incorporate a UV sensitive, dissolution promoter into the
Parylene as deposited using the vacuum technique?

I realize this may not be possible if the Parylene is completely
cross-linked as it is deposited, but thought I'd ask anyway.  The resulting
system would be similar to what you would get by electroplating photoresist,
but without the wet processing, i.e. a completely conformal photosensitive
polymer coating.

Thanks again.  --Steve

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
University Wafer
Addison Engineering
Harrick Plasma, Inc.