I'm seeking a company or fab that can do deep etching (say 20 um or more)
with vertical sidewalls into/through any of the following materials:

sapphire
glass/SiO2
quartz
aluminum nitride
alumina
diamond

These will be small wafer batches.  Any info would be useful, and you can
contact me directly.


John Chiaverini
NIST Boulder, Time and Frequency Division
Ion Storage Group, Quantum Computation Project
[email protected]
(303) 497-4364