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MEMSnet Home: MEMS-Talk: RIE Etching of Ni
RIE Etching of Ni
2003-03-08
[email protected]
RIE Etching of Ni
[email protected]
2003-03-08
Greetings,

Is there a chemistry for RIE dry etching Ni?
I only need to go through 200A and then I hit a W layer I etch with SF6.

Thank You

Brent Garber

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