Hi,

I want to sputter Gold, Chromium or Aluminium
nearly stress free ( between 0 MPa and 20 MPa ).

Can anybody tell me, if it's possible and where can
I find more information about it?

I have seached in www.sciencedirect.com, but could not
find papers about it.

Best regards,

Stefan Junge



--
Institute for Microsensors, -actuators and -systems (IMSAS)
University of Bremen
Dipl.-Ing. Stefan Junge (Ph.D student)
Dep. 1: Physics/Electrical Engineering
Otto-Hahn-Allee
28359 Bremen, Germany

P.O. Box 330 440
28334 Bremen, Germany

Tel.: +49-421-218-3586
Fax.: +49-421-218-4774
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