John, we don't do etching but we do do ESEM to video for QA. If interesting
let me know. Demos at http://www.videoem.com/videoem/demovideo.asp
Darden Hood
MicroAnalytica, LLC
4989 SW 74 Court
Miami, Florida 33155
[email protected]
----- Original Message -----
From: John Chiaverini
To:
Sent: Friday, March 07, 2003 12:35 PM
Subject: [mems-talk] seeking services: DRIE of glass, quartz, etc.
I'm seeking a company or fab that can do deep etching (say 20 um or more)
with vertical sidewalls into/through any of the following materials:
sapphire
glass/SiO2
quartz
aluminum nitride
alumina
diamond
These will be small wafer batches. Any info would be useful, and you can
contact me directly.
John Chiaverini
NIST Boulder, Time and Frequency Division
Ion Storage Group, Quantum Computation Project
[email protected]
(303) 497-4364
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