We tend to attach the wafer to be patterned to another wafer using black
wax.
You won't get as good coverage as on a flat wafer, but play around with spin
speeds and resist viscosity.

David Nemeth

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of sandhya sandhya
Sent: Tuesday, February 25, 2003 5:56 PM
To: [email protected]
Subject: [mems-talk] Photopatterning



Hello

I am sandhya, a research student . Can ,anyone say me how to apply
photoresist(spin) on a wafer having holes in it and pattern them. we are
using SPR 200 series positive resist.

Thanks

sicerely,

Sandhya





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