Patrick,

Different polyimides spin at different thicknesses - most companies who produce
polyimide should provide a technical data sheet that should provide spin speed
vs. thickness for that given product.  The O2 etch rate depends on the type of
polyimide and how it was cured, the RF power,  pressure and type of machine.

HD Microsystem 2611 produces 5 microns at 3000 rpm
                    2610 produces 1.75 microns at 3000 rpm

Hope this helps,

Thanks,

Greg Miller
KVH Industries
Email: [email protected]


-----Original Message-----
From: Patrick Carlberg [mailto:[email protected]]
Sent: Tuesday, March 11, 2003 5:01 AM
To: [email protected]
Subject: [mems-talk] Questions on Polyimide


Dear all,

Does anyone know the approximate thickness of Polyimide on Si spun at
3000rpm or the etching rate in O2-plasma.

Sincerely
Patrick Carlberg


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