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MEMSnet Home: MEMS-Talk: mask material for wet etch glass
mask material for wet etch glass
2003-03-11
Zhimin J Yao
2003-03-12
Roger Shile
2003-03-12
[email protected]
mask material for wet etch glass
[email protected]
2003-03-12
Chrome should do the trick as long as you prepare the surface with an argon
sputter clean before sputtering the Cr on the surface. Tends to modify the
surface slightly allowing better adhesion. Bob Henderson

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