Jamie

An alternative route to wet etching that you might try is powder
blasting. This is particularly suited to the abrason of brittile
materials such as glass. Etch depths of 0.5 to 1 mm can been achieved. A
Limiting factor is the appature width which is typically no less than 70
um.

 Regards

Richard
-----Original Message-----
From: Zhimin J Yao [mailto:[email protected]]
Sent: 11 March 2003 19:59
To: [email protected]
Subject: [mems-talk] mask material for wet etch glass

Hi,

We are trying to etch about 0.5 - 1mm deep into glass or quartz using a
metal mask.  Au did not work well because the adhesion layer got etched.
Does anybody know what metal works the best?  Anybody tried W?

Thanks,
Z. Jamie Yao


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