Hello all,
I've been trying several different techniques in an attempt to minimize bubbles
in my SU-8. At first I tried pippeting it onto my substrate using a large bore
pippette. I also tried dispensing from a syringe and pouring straight from
the bottle. The pouring seems to work best but I still get a sizable bubble
count. From here I've tried sucking the bubbles out with a needle and syringe
but to no avail.
I've read of others wiping the SU-8 across the wafers but have yet to try this
method for fear of destroying the substrate. For what it's worth I'm using
SU-8 2035 with a target thickness of 50microns but I think I've got my spin
recipe locked down.
Thanks for your time,
Frank Berisford