Frank,

      I used glass syringes and put them in an oven between 40-60C for
5-10 minutes to get rid of bubbles.

Jennifer Pagan
Senior Process Engineer
WaveguideSolutions, Inc.
[email protected]
Phone: 704-927-0408
Fax: 704-599-3536


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Christopher F.
Blanford
Sent: Monday, March 17, 2003 8:25 AM
To: [email protected]; General MEMS discussion
Subject: Re: [mems-talk] Bubbles in my SU-8

Dear Frank Berisford

I put the SU-8 resist into a sonic bath with a degas cycle to removed
dissolved gases. This cycle pulses the sonics, assisting the nucleation
of these gases. About 5 minutes of pulsed sonics at full power and 40
C, gives (nearly) bubble-free coatings.

Regards,

Chris Blanford

On Friday, March 14, 2003, at 11:07  am, frank berisford wrote:

> I've been trying several different techniques in an attempt to
> minimize bubbles
> in my SU-8.  At first I tried pippeting it onto my substrate using a
> large bore
> pippette.  I also tried dispensing from a syringe and pouring straight

> from
> the bottle.  The pouring seems to work best but I still get a sizable
> bubble
> count.  From here I've tried sucking the bubbles out with a needle and

> syringe
> but to no avail.
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: +44 (0)1865 282603; Fax: +44 (0)1865 272690
PGP keyID: 8D830BC9  http://pgp.mit.edu/


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