Danny,
          Complex answer.  Using image reversal and a 3D holographic aligner I
have seen 0.1 micron geometry on the side walls and the bottom of an etched
trench.  I can reach the original engineer for more information if you want to
follow up.  Bill Moffat

-----Original Message-----
From: Danny Klein [mailto:[email protected]]
Sent: Monday, March 17, 2003 5:02 AM
To: [email protected]
Subject: [mems-talk] Etching another microchannel on a facet of a larger
existingmicrochannel


Hello mems-talk members,

I'm trying to establish a way to etch a few long parallel micro-channels on a
facet of a larger existing microchannel.
If someone knows of a way to manufacture according to that idea or have seen an
article dealing with that idea please let me know.

Thank you in advance,

Danny Klein.
-----------------------------------------------------

Danny Klein
Department of Mechanical Engineering
Technion, Israel Institute of Technology
Haifa, 32000
Israel

Tel (Lab.): 972-4-8292946(3861)
Email: [email protected]

-----------------------------------------------------

_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/