Excuse my ignorance, I am just beginning research into the use of FIB and other
fabrication techniques to build MEMS structures.  My expertise is electron
microscopy and spectroscopy (Auger, XPS, TEM/STEM) and use of FIB for defect
analysis & TEM preparation.  I am interested in designing a MEMS structure on a
modified TEM grid to manipulate a TEM sample.

Is there such a thing as a database of publicly available electronic files
(i.e., CAD and/or STL files) for designs of MEMS modules such as micro-
actuators, manipulators, etc.  I have seen several versions of interdigitated
type X,Y, Z translation and torsional capacitor plate type motion structures and
micro-tweezers, etc.  For directly milled and deposited structures, I assume
these devices are based upon design drawings that are programmed analogous to
CNC.  At least this can be done in principal with a FIB using script type
language for control, reliability depending upon complexity.

It seems that if electronic files of MEMS designs were available researchers and
designers could move more quickly to test & modify structures using "standard"
components as a basis.  I suppose the designs could even be licensed or used
with approval of the designer.

Thanks.

Regards,
Ed