Hi everyone,
Im starting to use AZ 9260 resist and would like to build the resist
thickness up to 100 to 150 microns the predicted light transmition limit
for use as a electrodeposition mould.
Since I do not have a co rotating cover I will have build up the
thickness with multiple spins.
As a starting point Im using the process recommendation for AZ 4562 100
micron given by the supplier.
Does anyone have a nailed down receipe for AZ 9620 for a 100 micron
resist ?
thanks in advance,
Dr. Martin Thornton
CEA saclay
Ormes des Merisiers
Gif sur Yvette
91191
France
Tél: + 33 1 69 08 51 34
Fax: +33 1 69 08 87 86