Dear MEMS-Colleagues,

Yes, there have been studies on the growth of a nitride layer on porous silicon
(macroporous silicon). The work has been done in Dr. Lehmann's group, see e.g.,
V. Lehmann, W. Honlein, H. Reisinger, A. Spitzer, H. Wendt, J. Willer, Thin
Solid Films, 276, 138, 1996, or: LEHMANN, V., RÖNNEBECK, S., Sensors and
Actuators A, 95, 202 (2001). These Si3N4 have an excellent quality.

I hope this helps. If you need more information, send me an email.

With best regards
   Marc


Marc Christophersen, PhD
University of Rochester, NY
601 Elmwood Ave.
P.O. Box CFH
Rochester, NY 14642 US
http://marc-christophersen.de


General MEMS discussion  schrieb am 19.03.03 15:08:04:
>
> Dear All,
>     Is there anyone who have grown SiN on porous silicon? I want to know
> what the structure of the SiN layer is, solid or porous?
>     Thank you!
>
> Xiaotong Gao
> 03/19/2003
>
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