Mark
EVG has just come out with a system to measure this.
Shay kaplan

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Mark van der Heijden
Sent: Wednesday, March 19, 2003 3:32 PM
To: [email protected]
Subject: [mems-talk] Overlay between front and back of wafer



Hi All,

Does anyone know of a method/device to measure which i can use to measure
the overlay between structures on the front and the back of a wafer.

Thanks,
Mark




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