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MEMSnet Home: MEMS-Talk: bridging
bridging
2003-03-19
Jakob Christoph
2003-03-20
Bill Moffat
bridging
Jakob Christoph
2003-03-19
hi

we are processing a negative photoresist in hight of 20 to 200 µm. with aspect
ratios over 1 we have problems with bridging.
did somone have a solution to solve this problem?

thanks for your help

Christoph Jakob

_________________________________

Jakob Christoph
Dipl. Ing. FH
Development Engineer Microparts

elmicron ag
Feldstrasse 1
Postfach 4030
CH-6304 Zug

phone:    + 41 41 724 88 35
fax:        + 41 41 724 88 89
e-mail:    [email protected]
              www.elmicron.ch
_________________________________





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