Hi Mark,

   If a Carl Suss MA6 contact mask aligner is available to you, you can use
its backside alignment capabilities to measure overlay between front and
backside of the wafer.

Phil






>From: "Mark van der Heijden" 
>Reply-To: General MEMS discussion 
>To: [email protected]
>Subject: [mems-talk] Overlay between front and back of wafer
>Date: Wed, 19 Mar 2003 13:31:56 +0000
>
>
>Hi All,
>
>Does anyone know of a method/device to measure which i can use to measure
>the overlay between structures on the front and the back of a wafer.
>
>Thanks,
>Mark
>
>
>
>
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