Hello Mark,
SUSS MicroTec is offering easy-to-use Front to Backside Measurement Tools.
Please visit our web site at http://www.suss.com or contact me directly if
you are interested in details how the measurement is done.
Best Regards,
Frank.
--------------------------------------------
SUSS MicroTec
Applications Center Europe
Frank Runkel
Schleissheimer Str. 90
85748 Garching
Germany
Fon +49 89 32007 - 302
Fax +49 89 32007 - 390
email [email protected]
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>
> Message: 4
> Date: Wed, 19 Mar 2003 13:31:56 +0000
> From: "Mark van der Heijden"
> Subject: [mems-talk] Overlay between front and back of wafer
> To: [email protected]
> Message-ID:
> Content-Type: text/plain; charset=iso-8859-1; format=flowed
>
>
> Hi All,
>
> Does anyone know of a method/device to measure which i can use to measure
> the overlay between structures on the front and the back of a wafer.
>
> Thanks,
> Mark
>
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>
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