We make glass or metal microchannels by photosensitive glass process or
electroforming.
But the process is wet process.
Some photos are in our website.
Our technologies meet your need.
I think the structure you want can be formed by some molding process too. Base
material can be glass, glass/ceramic, alumina and so on.

* The holes of 60um can be formed by our process at 1mm thick glass.

S.J. Cho
MEMSware inc.
Tel:+82-(0)2-2281-6558
Fax:+82-(0)2-2281-6559
www.memsware.com
[email protected]